Features
High-precision inline system for high-volume semiconductor chips, suitable for advanced packaging.
Spray cleaning for efficient removal of flux and organic/inorganic contaminants.
3 sets extended chemical cleaning + 3-stage DI rinsing + extended hot air drying, thorough cleaning & drying.
Auto-replenishment of cleaning fluid and DI water, reducing manual work.
Precisely adjustable cleaning, rinsing and air-knife pressure for various processes.
High-flow design ensures fluid penetration to chip bottom, superior cleaning performance.
Built-in DI water resistivity monitor for rinsing, real-time water quality guarantee.
Air-knife + extended infrared hot air circulation drying, efficient and uniform.
PLC control with bilingual GUI, easy program setting, storage and recall.
SUS304 stainless steel frame & components, high-temp and acid/alkali resistant.
Compatible with upstream/downstream equipment to combine as a fully automated production line.
Specification document
| Item | Basic Specifications |
| Conveyor Belt Width | 600 mm |
| Conveyor Speed | 0.1~1.5 m/min |
| Conveyor Height | 900 ± 50 mm |
| Conveyor Direction | Left to Right |
| Cleaning Height | 100 mm |
| Cleaning/Rinsing Tank Capacity | 330 L / 140L |
| Filtration | 1µm |
| DI Water Consumption | 400~1000 L/H |
| Air Exhaust Volume | 42 m³/H |
| Control Method | PC + PLC |
| Power / Air Supply | 380VAC, 3P, 50Hz, 140KW /0.5 Mpa, 200 L/min |
| DI Water Resistivity | 0~18 MΩ |
| Machine Dimensions | L7000*W1750*H1950 mm |
| Machine Weight | 3800 KG |
